pvd chambers
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AtOMS | Thin Film Atomic Optical Monitoring System
$100,000.00 – $200,000.00 Select options This product has multiple variants. The options may be chosen on the product pageOptical metrology tool for real-time monitoring and control of vacuum thin film deposition processes and dry etching. A single system can monitor up to 4 chemical elements simultaneously, displaying each individual element deposition rate and the composition of the compound film as it is deposited/etched. With over 60 elements available.
