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Agilent IDP-15 Hermetically-Sealed Dry Scroll Vacuum Pump, 115-230VAC, with Integral Isolation Valve. PN: X3815-64010

This IDP-15 model, Agilent technologies part number X3815-64010, includes an Integrated Inlet Isolation Valve. The isolation valve is installed inside the module and it adds no height to the pump inlet. It protects against backward migration of air through the scroll pump inlet when the IDP-15 looses power. This isolation valve prevents sudden venting of customer’s chamber or instrument on system power loss. The isolation valve mechanism incorporates a spring which holds the inlet valve normally closed; the lower pressure in the pump is used to compress the spring and keep the inlet isolation valve open. On power loss the solenoid valve opens and vents the vacuum pump causing the inlet isolation valve to close, closing time is typically 20 milliseconds. When power is restored, the solenoid valve closes and the inside of vacuum pump begins evacuating, the inlet isolation valve will reopen in about 10 seconds.

This Agilent  IDP-15 dry scroll pump (X3815-64000) does not contain corrosive, explosive or particulate forming gases. The state of the art in dry scroll pump technology  designed for extremely quiet and low vibration operation, delivering a peak pumping speed of 9.04 cfm at 60Hz.

  • Clean with less maintenance
    • Oil-free which means no pump oil changes
    • You don’t have to worry about oil back streaming or migrating into your process
  • Really quiet – you can easily have a conversation while it is running right next to you
  • Pumping Speeds of 9.04 CFM or 15.4 m3/h at 60 Hz with a base pressure of 10 millitorr
  • Manufacturer PN X3815-64010

Clean. Quiet. Reliable. Oil Free

Better performance than pumps of similar size

Isolated Dry Pumps (IDP) rapidly pump down to low base pressures, maximizing turbo pump performance and system reliability

A cleaner environment inside the pump and your lab

  • IDP-15 dry scroll pumps do not use oil, which can spill, leak or infiltrate the vacuum system. Good for your process, lab, and the environment
  • The hermetic design provides a clean gas path through the pump, which eliminates any risk of oil or grease contamination allowing the motor and bearings to run at atmospheric pressure, isolating them from exposure to vacuum process gases or water vapor

Less downtime, lower ownership costs

  • Traditional pumps demand hours of scheduled maintenance and eliminate expensive oil topping, changing, and disposal | plus the risk of pump seizure
  • IDP scroll pumps require simple tip seal replacements in 2-3 year intervals and can be completed in about 15 minutes.

Quiet and low vibration

Worried about vibration about delicate lab equipment? Worry no more! The Agilent IDP-15 dry scroll pump operates as quietly as a normal conversation (50 dBA) and the scroll design reduces vibration.

Pumping Speed: 256 liters per minute or 15.4 m3 per hour | 9 CFM

Base Pressure: 13.3 x 10-3 mbar or 10 x 10-3 Torr

A typical scroll pump like the Agilent IDP-15 will achieve a base pressure of 20 mTorr. When you see a gradual increase of your base pressure over time, it is time to change your tip seal

Inlet Connection: NW25

Exhaust Connection: NW16

You can purchase wing clamp and centering rings to go with your pump. Need help setting up your system for a specific application? We have a staff of vacuum engineers that can help build out a system that can meet your needs in one package. Just contact us

Common Applications: ideal solution for vacuum users in most clean applications, for backing a turbo pump, and for load-lock applications.

Academic and Research (Government research labs, University labs, and High energy physics/beam lines)

Industrial (Glovebox, Crystal pulling, LED/light manufacturing, Freeze drying, Gel drying, and Sample preparation)

Instrumentation (Cryogenics, Electron microscope, Helium re-circulation, Leak detectors, Mass spectrometry, Ion implant, and Surface science instruments)

Conformance: CE, CSA, RoHS


User Manual Data Sheet

For more documentation, please visit DigiVac’s folder.

Technical Specifications

Base pressure (50 Hz) – Torr & mbar
  • 1 x 10-2 Torr
  • 1.3 x 10-2 mbar
Base pressure (60 Hz) – Torr & mbar
  • 1 x 10-2 Torr
  • 1.3 x 10-2 mbar
Dimensions (WxHxL)
  • 13.1 in x 14.3 in x 19.1 in
Exhaust Connection
  • NW16
  • 14.3 in
Inlet Connection
  • NW25
Input Voltage
  • 220-230 VAC
  • 100-115
  • 19.1 in
Noise Level
  • 50 dB(A)
Pumping Speed (50 Hz)
  • 12.8 m3/h
  • 214 L/min
  • 7.5 CFM
Pumping Speed (60 Hz)
  • 15.4 m3/h
  • 256 L/min
  • 9.1 CFM
  • 40151502
  • 13.1 in

Product Inquiry

Agilent IDP-15 dry scroll pump
Agilent IDP-15 Dry Scroll Vacuum Pump, with inlet Isolation Valve | 9 CFM | 115V or 230V (PN X3815-64010)
Original price was: $9,409.00.Current price is: $8,470.00.