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This Cold Cathode Pirani Gauge combines two sensor types into a single compact device to reliably measure from atmosphere to 7.6 x 10-10 torr (1 x 10-9 mbar) on a single port. With the sensor combination of cold cathode and pirani, there is a smooth transition and practicality between ranges, making it useful across many applications that work within the atmosphere to ultra high vacuum range.

  • Feed-through is corrosive proof
  • Operating temperature of +5 to +55 °C (ambient)
  • Compact size easy for setup on most systems
  • Compliance & standards: CE, EN, UL, SEMI, RoHS

Cold Cathode Pirani Gauge (CCPG Gauge) Features:

  • Rugged: long lifetime in harsh environments, low magnetic stray field, and corrosion-proof feed through
  • Versatile and Convenient: zero maintenance with a replaceable insert, super compact size, atmosphere to ultra high vacuum with one port, and reliable fast ignition
  • Compliance & standards: CE, EN, UL, SEMI, RoHS
  • Compatible with DigiVac Instruments: StrataVac Multi-gauge Controller and the StrataVac Touch | Multi-gauge Controller with Touchscreen


  • General vacuum measurement in:  industrial furnaces, semiconductor, refrigeration and air conditioning
  • Base pressure monitoring and control from atmosphere to ultra high vacuum in applications like evaporation and sputter coating
  • R&D and analytical processing: mass spectrometry, electron microscopes, medical manufacturing, optical and high energy physics


Data Sheet

For more documentation, please visit DigiVac’s folder.

Technical Specifications

Units mTorr, Torr
Control Range 760 Torr to 7.6 E-10 Torr
Range with Accuracy 760 Torr to 7.6 E-10 Torr ±30%
Sensor Type
Certifications CE, EN, UL, SEMI, RoHS

Product Inquiry

Cold Cathode/Pirani Combination Gauge | ATM to Ultra High Vacuum | 760 Torr to 7.6 E-10 Torr