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Description

DPCP Quantum | TriSENS Wide Range Vacuum Sensor

The Digivac TriSENS  Wide Range Vacuum Sensor Delivers High Vacuum Measurement + Process Control + Overpressure Indication All in One

Deep & Wide Vacuum Measurement

Highly accurate direct pressure measurement down to 10 microns (.01 Torr) combined with high vacuum measurement down to 10-6

Measurement range:  7.5×10-6 to 1000 Torr

Accuracy Specifications:

1000 Torr to .001 Torr = +/- 3%

.0001 Torr to 10-6 Torr = +/- 20%

Contamination Containment

Integrated baffle helps protect sensor elements from particulate contamination and increase its longevity. The Ceramic Coated Sensor has much more sensor resilience, as it will be less reactive to solvents or any contamination. The Resilience allows you to be able to clean the sensor, making it Corrosion Resistant as well.

Visual Process Indicator

Multi-color LEDs to indicate pressure range. Includes a bright yellow overpressure indicator to help you avoid system damage. This is very useful when not using a display controller

The DPCP Quantum | TriSENS Vacuum Sensor establishes new standards with an all-in-one wide range measurement solution for a wide selection of vacuum applications. This transducer is an overall cost-effective solution with an ultra-wide 9 decade range that includes 5 decades of gas independent measurement. The Digivac TriSENS: Quantum Pirani, Capacitance, Piezo all-in-one gauge

Advantages

  • Deep & wide measuring range of 9 decades delivered by an all-in-one gauge that combines pirani,
    capacitance manometer, and piezo technology
  • 6 decades of gas independent measurement| 5×10-3 to 1333 mbar
  • Reliable solid-state relay for process control
  • 0-10V for PLC Input
  • LED Color Pressure Indicator
  • Robust ceramic capacitance diaphragm gauge
  • Mountable in any orientation without impact on performance

Applications

  • PVD Coating Equipment
  • Freeze Drying endpoint detection
  • Load lock control
  • Mass Spectrometry
  • Scanning electron microscopy
  • Semiconductor
  • Research
  • Vacuum pump service
  • Heat treatment, Vacuum furnaces

Installation Fitting Alternatives

DigiVac’s Quantum Sensors come with the standard KF16 fitting, However if you are looking for alternative connections we do also offer  KF25 and Conflat on request only, Please submit a Product Inquiry below if you would like to purchases these alterative options.

Why is the Quantum Gauge Series a Quantum Leap for Vacuum Measurement?

The Quantum Gauge Series is a quantum leap in simplicity and range for vacuum gauging. Smart pairings of sensor technologies that deliver what people really need.

All-in-one, highly accurate wide range vacuum measurement at a cost-effective price point.

Other DigiVac Quantum Gauge Series OptionsDPP SmartSENS, DCP DuoSENS

wide ranfe, dpcp

Check out our Dash TriSens Bundle for ultimate reading and logging Capabilities

Downloads

Data Sheet Operation Manual Helium Specifications

For more documentation, please visit DigiVac’s folder.

Data

Measuring Range 1×10-5 to 1333 mbar (7.5×10-6 to 1000 Torr)
Measuring principle 1×10-6 to 1×10-3 mbar MEMS Pirani thermal conductivity
Measuring principle 5×10-3 to 3.99 mbar Capacitance manometer
Measuring principle 6 to 1333 mbar MEMS piezo diaphragm
Measurement Accuracy (Torr)
From To Accuracy
7.5×10-6 7.5×10-5 50%
7.5×10-5 7.5×10-3 20%
7.5×10-3 1000 Torr 3%
DPCP Quantum | TriSENS Vacuum Sensor
DPCP Quantum | TriSENS Wide Range Vacuum Sensor, Pirani & Capacitive Piezo 7.5×10-6 to 1000 Torr
$1,394.23