Description
Inficon Trigon BCG552 ATM to Ultra High Vacuum TripleGauge includes:
- BCG552 15DSub,2SP,OLED,25KF
- Bayard-Alpert + Pirani+ CDG + ATM sensor
- LED display
- Measurement: Torr
- Flange: KF25
- Set point relays
- Electrical connection: D-sub, 15-pin, male
- RS232C serial interface
- PN: 3BC3-G16-C300
The TripleGauge® or Trigon BCG552 combines 3 vacuum sensing elements in one sensor flange. This flagship of the new TrigonTM family offers a extremely wide measurement range from UHV (5 x10-10) up to ATM (1500 mbar).
With its additional ATM sensor BCG552 is well-suited for differential pressure measurement and the use as vacuum switch in several applications. BCG552 consists out of an Bayard-Alpert Hot Ionization sensor, a classical, robust and reliable Pirani sensor element and a miniaturized capacitance diaphragm gauge on vacuum side. A Piezo sensor on ATM side completes the BCG552. Combining technologies reduces the complexity of installation, setup, and integration, thus reducing cost and valuable tool space
The supported Bayard-Alpert dual filament offers superior accuracy, repeatability and longevity in the UHV and HV range, while the miniaturized capacitance diaphragm gauge has superior accuracy in the ATM range and is gas type independent.
INFICON Trigon BCG552 Features:
- BCG552 15DSub,2SP,OLED,25KF
- 3 + 1 sensing elements for extremely wide measurement range, cost reduction & space savings
- Measurement range: UHV (5 x10-10) up to ATM (1500 mbar)
- 2 filaments for Bayard-Alpert system
- Gas type independent pressure measurement above 10 Torr provides more reliable load lock control for any gas mixtures
- Differential pressure measurement eliminates uncertainty related to atmospheric pressure changes
- Automatic high vacuum Pirani adjustment reduces operator interventions
- Galvanic isolated electronics to avoid electric stray current
- Sliding emission mode to avoid pressure jumps and freeze when switching the emission stream
- Set point relays
- Bright & big OLED display (90° rotatable) with user interface
- RS232C serial interface
- Usable in conjunction with VGC50x Controller series
- Backwards compatible to TripleGauge® BCG450
- RoHS compliance
- Electrical connection: D-sub, 15-pin, male
- PN 3BC3-G16-C300
Inficon Trigon Applications:
- Pressure measurement in Semiconductor processes, transfer and loadlock chambers
- Industrial coating
- General vacuum measurement and control on systems in the low to ultra high vacuum range
Can work with virtually any Vacuum Pump or Vacuum Pump System with the proper INFICON signal cable. The gauge is intended for operation in connection with a DigiVac StrataVac Controller.
- Semiconductor tool manufacturing
- Semiconductor IDM and Foundry
- Analytical Instrumentation
- Display
- Pharma and Medical
- Vacuum Coating
- Industrial manufacturing
- Research & Academia
Inficon Trigon Power supply:
This Digivac Power Supply can be ordered to support this gauge when not paired with a vacuum controller or one of our StrataVac or FYRA controllers. It comes standard with a DB15 for this Inficon Trigon gauge.
