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Description

Pfeiffer EVR 116 Gas Control Valve, KF16 | For upstream or downstream vacuum control

Pfeiffer EVR 116 gas control valve, motorized, PF I39 931 A

Description

  • High gas throughput
  • Very broad control range
  • With integrated motor control electronics
  • PF I39 931 A

Features

  • Max. controllable gas flow:
    • 1.25 · 103 hPa·l/s
  • Min. controllable gas flow:
    • 5 · 10-6 hPa·l/s
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EVR 116, Gas control valve, motorized

Order number: PF I39 931 A
  • High gas throughput
  • Very broad control range
  • With integrated motor control electronics
Actuator Motorized
Ambient temperature 5-40 °C | 41-104 °F | 278-313 K
Bake-out temperature: actuator 60 °C | 140 °F | 333 K
Bake-out temperature: housing 80 °C | 176 °F | 353 K
Closing/opening time 3 s/4 s
Control RVC 300 or IF 200
Control voltage 0 – 10 V DC
Dosing sleeve Fluoroplastomer
Housing/needle/filter Stainless steel
Max. controllable gas flow 1.25 · 103 hPa·l/s
Min. controllable gas flow 5 · 10-6 hPa·l/s
Nominal diameter DN 16 ISO-KF
Operating pressure min. 1 · 10-8 hPa | 7.5 · 10-9 Torr | 1 · 10-8 mbar
Pressure max. (absolute) 2,500 hPa | 1,875 Torr | 2,500 mbar
Seal FKM
Supply: consumption max. 12 W
Supply: Voltage V DC 24 V DC
Tightness 1 · 10-10 Pa m3/s | 7.5 · 10-10 Torr l/s | 1 · 10-9 mbar l/s
Type Gas control valve
Weight 0.75 kg | 1.65 lb

 

Specifications

Actuator Motorized
Ambient temperature 5-40 °C | 41-104 °F | 278-313 K
Bakeout temperature: actuator 60 °C | 140 °F | 333 K
Bakeout temperature: housing 80 °C | 176 °F | 353 K
Closing/opening time 3 s/4 s
Control RVC 300 or IF 200
Control voltage 0 – 10 V DC
Dosing sleeve Fluoroplastomer
Housing/needle/filter Stainless steel
Max. controllable gas flow 1.25 · 103 hPa·l/s
Min. controllable gas flow 5 · 10-6 hPa·l/s
Nominal diameter DN 16 ISO-KF
Operating pressure min. 1 · 10-8 hPa | 7.5 · 10-9 Torr | 1 · 10-8 mbar
Pressure max. (absolute) 2,500 hPa | 1,875 Torr | 2,500 mbar
Seal FKM
Supply: consumption max. 12 W
Supply: Voltage V DC 24 V DC
Tightness 1 · 10-10 Pa m3/s | 7.5 · 10-10 Torr l/s | 1 · 10-9 mbar l/s
Type Gas control valve
Weight 0.75 kg | 1.65 lb

Accessories

Cables

    • Connection cables

Control Devices

Pump Curve

evr 116

Downloads

Data Sheet | Operation Manual |

For more documentation, please visit DigiVac’s folder.

Product Inquiry



Pfeiffer EVR 116 Gas control valve PFI39931A
Pfeiffer EVR 116 gas control valve, PF I39 931 A | Control valve for upstream or downstream control
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