Description

The 1 Torr capacitance manometer is a reliable capacitance gauge that can measure vacuum from 1 millitorr to 1 Torr with high accuracy |  Precision measurement 0.01% of  full scale. ACG series| Ambient Manometer

1 Torr Capacitance Manometer Features:

  • Fast stability after power on and recovery from atmospheric pressure
  • Corrosion resistant ceramic sensor
  • Excellent long-term signal stability
  • Temperature compensated
  • Clean room compliant: sensor double protected from contamination
  • One push button zero function
  • 2 set-points and RS232 interface
  • Analog output: 0 to 10 VDC
  • Wetted Materials: Aluminum oxide ceramic Stainless steel (AISI 316L)
  • Compliance and Standards: CE, RoHS, UL, CSA, EN, and SEMI
  • Power and display measurement readings: StrataVac and StrataVac Touch

Function

The Ambient Capacitance Gauge consists of a capacitive sensor element made of aluminum oxide ceramics and electronics
which convert the capacitance into a DC voltage output signal. The output signal is linear to the measured pressure and independent of the gas type.

Mount the gauge so that no vibrations occur. The ambient manometer gauge may be mounted in any orientation. To keep condensates and particles from getting into the measuring chamber preferably choose a horizontal to upright position and possibly use a seal with a centering ring and filter.

Applications:

  • Semiconductor Manufacturing
    • Vacuum etching
    • Chemical vapor deposition
    • Physical vapor deposition
    • Atomic layer deposition
  • Data storage and display manufacturing equipment
  • Industrial vacuum equipment
  • High accuracy pressure measurement applications

Downloads

User Manual Data Sheet

For more documentation, please visit DigiVac’s folder.

Technical Specifications

Units mTorr, Torr
Control Range 100 mTorr to 1000 Torr
Range with Accuracy 1 millitorr to 1 Torr
Sensor Type
Dimensions
Certifications CE, EN, UL, SEMI, RoHS

Product Inquiry



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