Flow Measurement & Vacuum Control in Plasma Treating Systems
Flow Measurement & Vacuum Control in Plasma Treating Systems INTRODUCTION: Plasma is an effective form of surface treatment. It is a crucial process step to ensure that surface contaminants don’t prevent bonding. For a low pressure plasma treatment process, maintaining a precise vacuum level can make plasma runs more repeatable by isolating the vacuum pressure variable. PROBLEM: Some plasma treating systems do not have flow measurement and process control features, which are required for hitting a target vacuum level. Furthermore, as vacuum pumps age over time, their base pressure changes. A changing base pressure and thus plasma pressure may cause inconsistent
