cathode
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Edwards WRH-NW25 | Active Hot Cathode Wide Range Gauge (WRH) | 750.06 to 3.750 × 10⁻¹⁰ Torr
The Edwards WRGH Active Hot Cathode Wide Range Gauge offers the ability to measure from atmosphere to 10-10 mbar with a single gauge, with accuracy and repeatability.
Measurement Range: 750.06 to 3.750 × 10⁻¹⁰ Torr
Accuracy: 1000 to 10 mbar ±30% | 10 to 1×10-8 mbar ±10% -
AtOMS | Thin Film Atomic Optical Monitoring System
Optical metrology tool for real-time monitoring and control of vacuum thin film deposition processes and dry etching. A single system can monitor up to 4 chemical elements simultaneously, displaying each individual element deposition rate and the composition of the compound film as it is deposited/etched. With over 60 elements available.