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Description

Pfeiffer EVN 116 Gas Dosing Valve| For upstream medium vacuum control

EVN 116, Gas dosing valve with separate isolation valve, manually actuated, stainless steel with KF16 interface, PF I32 031

EVN 116 Description

  • Closable without changing the gas flow setting
  • Optimum characteristic
  • Digital position display
  • Excellent reproducibility
  • Extremely small dead volume
  • Very broad regulating range
  • (PN): PF I32 031

Features

  • Max. controllable gas flow:
    • 1 · 103:hPalps hPa·l/s
  • Min. controllable gas flow:
    • 5 · 10-6:hPalps hPa·l/s

 

Specifications

Bakeout temperature Max. 150 °C
Bakeout temperature at the flange 150:degC °C
Dead volume 0.032:ccm cm³
Differential pressure 2500 hPa
Dosing sleeve Fluoroplastomer
Housing Stainless steel
Housing/needle/filter Stainless steel
Max. controllable gas flow 1 · 103:hPalps hPa·l/s
Min. controllable gas flow 5 · 10-6:hPalps hPa·l/s
Nominal diameter DN 16 ISO-KF
Min. controllable gas flow 5 · 10-6 hPa·l/s
Nominal diameter DN 16 ISO-KF
Operating pressure Max. 80 °C
Scope of delivery With separate shut-off valve
Tightness 1 · 10-10:Pakmps Pa m³/s
Type Gas control valve
Weight 0.4 kg

Pump Curve

Downloads

Operation Manual 

For more documentation, please visit DigiVac’s folder.

Product Inquiry



Pfeiffer EVN 116 Gas Dosing Valve| PF I32 031
$2,480.00