CORROSION RESISTANT SENSORS | How Durable are They? Back in May, SENS4 released an article about the new corrosion resistant MEMS Pirani vacuum sensors. Previously, sensors were limited due to the exposed materials that were subject to corrosive gasses and aggressive etch processes, which we at DigiVac and our customers have observed as well. Thus, with the introduction of the corrosion resistant SmartPirani™, there exists an option for a more durable vacuum sensor. These come with a protective coating, acting as a barrier against any aggressive gasses. It either comes in a ceramic or Parylene coating. CERAMIC VS. PARYLENE Ceramic is advantageous in that it is highly corrosion resistant, it is
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