Description
Agilent CDG500 | Capacitance Diaphragm Gauge
The Agilent CDG500 series of temperature compensated capacitance diaphragm gauges provides the highest level of accuracy in the high-pressure region. Full-scale measurement ranges are available from 1000 to 1 Torr (1333 to 1.3 mbar) in either VCR8 or KF16 Flange.
The CDG-500 series uses a corrosion resistant ultra pure alumina ceramic diaphragm providing exceptional signal stability, fast recovery from atmosphere, short warmup times, and unparalleled robustness.
Sensor Options
- CDG500T0001VCR8 | CDG-500 capacitance diaphragm gauge, 1 Torr, VCR8
- CDG500T0001KF16 | CDG-500 capacitance diaphragm gauge, 1 Torr, NW16 KF
- CDG500T0010VCR8 | CDG-500 capacitance diaphragm gauge, 10 Torr, VCR8
- CDG500T0010KF16 | CDG-500 capacitance diaphragm gauge, 10 Torr, NW16 KF
- CDG500T0100KF16 | CDG-500 capacitance diaphragm gauge, 100 Torr, NW16 KF
- CDG500T0100VCR8 | CDG-500 capacitance diaphragm gauge, 100 Torr, VCR8
- CDG500T1000KF16 | CDG-500 capacitance diaphragm gauge, 1000 Torr, NW16 KF
- CDG500T1000VCR8 | CDG-500 capacitance diaphragm gauge, 1000 Torr, VCR8
FEATURES
- Full scale ranges from 1 to 1000 Torr (1.3 to 1333 mbar) with pushbutton zeroing and optional setpoint control providing ease of integration
- Excellent long-term signal stability and repeatability
- Fast recovery from atmospheric pressures and rapid stabilization after start-up reduces process cycle times
- Application robustness is achieved through a corrosion resistant ceramic sensor with sensor-shielding protection
- Highest level of accuracy (0.2% of reading)
BENEFITS OF THE AGILENT CDG500 GAUGE
- Ease of integration
- Long term performance – comparable to competitor’s heated versions
- Reduces process cycle times
- Application robustness
APPLICATIONS
- Thin film and vacuum processes
- Industrial vacuum processes
- Data storage
- Semiconductor production processes
DigiVac Recommendations
DASH Portable Capacitance manometer Gauge. The DigiVac Bullseye DASH is the first portable high vacuum display and capacitance manometer gauge in the world; it also powers and displays CM readings and contains patented vacuum graphing technology.
FYRA Vacuum Controller | Multi-Gauge Controller with Touchscreen | ATM to High Vacuum | UL/CSA/CE. The FYRA is a versatile vacuum controller with a touchscreen or dial interface, the ability to measure and control from atmosphere to high vacuum, and the capability to drive different types of sensors. Measurement range is sensor dependent (1000 Torr (10+3) down to 10-10 Torr). Available as Bench top, Panel Mount or Rack Mount.
