Description
Agilent CDG500 | Capacitance Diaphragm Gauge
The Agilent CDG500 series of temperature compensated capacitance diaphragm gauges provides the highest level of accuracy in the high-pressure region. Full-scale measurement ranges are available from 1000 to 1 Torr (1333 to 1.3 mbar) in either VCR8 or KF16 Flange.
The CDG-500 series uses a corrosion resistant ultra pure alumina ceramic diaphragm providing exceptional signal stability, fast recovery from atmosphere, short warmup times, and unparalleled robustness.
Sensor Options
- CDG500T0001VCR8 | CDG-500 capacitance diaphragm gauge, 1 Torr, VCR8
- CDG500T0001KF16 | CDG-500 capacitance diaphragm gauge, 1 Torr, NW16 KF
- CDG500T0010VCR8 | CDG-500 capacitance diaphragm gauge, 10 Torr, VCR8
- CDG500T0010KF16 | CDG-500 capacitance diaphragm gauge, 10 Torr, NW16 KF
- CDG500T0100KF16 | CDG-500 capacitance diaphragm gauge, 100 Torr, NW16 KF
- CDG500T0100VCR8 | CDG-500 capacitance diaphragm gauge, 100 Torr, VCR8
- CDG500T1000KF16 | CDG-500 capacitance diaphragm gauge, 1000 Torr, NW16 KF
- CDG500T1000VCR8 | CDG-500 capacitance diaphragm gauge, 1000 Torr, VCR8
FEATURES
- Full scale ranges from 1 to 1000 Torr (1.3 to 1333 mbar) with pushbutton zeroing and optional setpoint control providing ease of integration
- Excellent long-term signal stability and repeatability
- Fast recovery from atmospheric pressures and rapid stabilization after start-up reduces process cycle times
- Application robustness is achieved through a corrosion resistant ceramic sensor with sensor-shielding protection
- Highest level of accuracy (0.2% of reading)
BENEFITS OF THE AGILENT CDG500 GAUGE
- Ease of integration
- Long term performance – comparable to competitor’s heated versions
- Reduces process cycle times
- Application robustness
APPLICATIONS
- Thin film and vacuum processes
- Industrial vacuum processes
- Data storage
- Semiconductor production processes
