Thin film
-
Edwards Barocel 7000 Series – 7100, 7025 & 7045 | Capacitance Manometers
The Edwards Barocel 7000 series Capacitance Manometers provides several variants with a variety of accuracies and temperature control abilities Measurement Range: 1000 to .1 Torr
-
Agilent CDG500 | Capacitance Diaphragm Gauge
The Agilent CDG500 series of temperature compensated capacitance diaphragm gauges provides the highest level of accuracy in the high-pressure region. Measurement Range: 1000 to 1 Torr (1333 to 1.3 mbar)
-
AtOMS | Thin Film Atomic Optical Monitoring System
Optical metrology tool for real-time monitoring and control of vacuum thin film deposition processes and dry etching. A single system can monitor up to 4 chemical elements simultaneously, displaying each individual element deposition rate and the composition of the compound film as it is deposited/etched. With over 60 elements available.