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Description

FYRA High Vacuum Gauge | Pirani & Capacitive Piezo

7.5×10-6 to 1000 Torr | TriSENS Gauge

FYRA Vacuum Gauge Controller – DigiVac’s Latest Innovation

FYRA high vacuum gauge measures from 1000 Torr down to 7.5 x 10-6 Torr includes the TriSens transducer (sensor) a combined pirani, piezo & capacitance manometer. The DigiVac FYRA vacuum gauge controller is a digital vacuum control instrument that employs a 3.9” capacitive touch screen and includes a tactile knob to easily interact with the vacuum gauge functions.

Need vacuum control too? The FYRA gauge controller is modular and can be upgraded to include vacuum control.

TriSens | DPCP Quantum Sensor

The DigiVac TriSens DPCP Quantum Gauge is an ultra wide range vacuum sensor that combines the novel Quantum pirani with piezo technology to deliver a measurement range of 7.5 x 10 -6 to 1000 Torr. 0-10V output, RS232 and 1 relay included.

Sensor Details

The DPCP Quantum | TriSENS Vacuum Sensor establishes new standards with an all-in-one wide range measurement solution for a wide selection of vacuum applications. This transducer is an overall cost-effective solution with an ultra-wide 9 decade range that includes 5 decades of gas independent measurement. The Digivac TriSENS: Quantum Pirani, Capacitance, Piezo all-in-one gauge

With the combined usage of the ultra wide range TriSENS DPCP and FYRA you no longer will have to use multiple sensors to interpret the process and data.

  • The all-in-one ultra wide range vacuum sensor combines 3 vacuum technologies: the novel MEMS pirani, Capacitive (Capacitance Manometer) and Piezo technology to deliver a measurement range of 7.5 x 10 -6 to 1000 Torr.
  • The Digivac TriSENS Vacuum Sensor Delivers High Vacuum Measurement + Process Control + Overpressure Indication All in One
  • Accuracy Specifications: 1000 Torr to 5 Torr =  +/- 3% 4.99 Torr to 10-5 Torr = +/- 14% 10-5 to 10-6 Torr = +/- 50%
  • Deep & Wide Vacuum Measurement : Highly accurate direct pressure measurement down to 10 microns (.01 Torr) combined with high vacuum measurement down to 10-6

  • High Vacuum Gauge Measurement range:  7.5×10-6 to 1000 Torr
  • Patent-pending Quantum Pirani that extends the measurable vacuum range by up to 3 decades combined with trusted rough vacuum piezo technology delivers a range of 9 decades. All at an attractive price point.
  • Contamination Containment: Integrated baffle helps protect sensor elements from particulate contamination and increase its longevity

  • Visual Process Indicator: Multi-color LEDs to indicate pressure range. Includes a bright yellow overpressure indicator to help you avoid system damage. This is very useful when not using a display controller

  • Ideal for Clean Processes: 1000 Torr down to 10-6 Torr with no ion gauge required. Includes integrated baffle to protect and extend life of sensor

High Vacuum Gauge Advantages

  • Deep & wide measuring range of 9 decades delivered by an all-in-one gauge that combines pirani,
    capacitance manometer, and piezo technology
  • 6 decades of gas independent measurement| 5×10-3 to 1333 mbar
  • Reliable solid-state relay for process control
  • 0-10V for PLC Input
  • LED Color Pressure Indicator
  • Robust ceramic capacitance diaphragm gauge
  • Mountable in any orientation without impact on performance

FYRA Pirani & Capacitive Piezo Vacuum Gauge | TriSENS High Vacuum Gauge Applications:

  • Mass spectrometers
  • Scanning electron microscopes
  • Furnace heat treatment
  • PVD coating of glass, optics, tools, etc.
  • Refrigeration service and manufacturing
  • Semiconductor processing
Measuring Range 1×10-5 to 1333 mbar (7.5×10-6 to 1000 Torr)
Measuring principle 1×10-6 to 1×10-3 mbar MEMS Pirani thermal conductivity
Measuring principle 5×10-3 to 3.99 mbar Capacitance manometer
Measuring principle 6 to 1333 mbar MEMS piezo diaphragm
Measurement Accuracy (Torr)
From To Accuracy
7.5×10-6 7.5×10-5 50%
7.5×10-5 7.5×10-3 20%
7.5×10-3 1000 Torr 3%

 

 

 

 

 

Downloads

Data Sheet DV Cup Cheat Sheet

For more documentation, please visit DigiVac’s folder.

Technical Specifications

Units Torr, mbar, kPa, microns, millitorr, mmHg, Hectopascal
Control Range Ability to support 10-10 Torr – 1000 Torr
Dimensions 6.5″x6.5″x2.5″
Telemetry Options USB, Wifi, 0-10 volts Analog out, 0-10 volts Analog in
Sensor Support MKS Convectron: 275071 (1/8″ NPT), 275203 (KF16);   DigiVac: SEN-VGT500, SEN-775i, Quantum (SEN-DPP, SEN-DCP, SEN-DPCP);  Pfeiffer: PKR251, IKR251;   Agilent: FRG700, PCG-750, PCG700, 531, 536, 531 equivalent, or PVG 500;   Setra: 730 capacitance manometers;   Inficon: PSG500, PSG550, Porter, SKY, Stripe, MAG, MPG & MPG400
Valve Support Dinamo, VacStable (Bleed), Solenoid-type Bellows and Plunger, 24V valves that are less than 24 Watts

Learn more about specifications on the FYRA Data Sheet.

Product Inquiry



FYRA High Vacuum Gauge
FYRA High Vacuum Gauge 7.5 x 10-6 to 1000 Torr | TriSENS Gauge, UL, CSA, CE
$2,979.08