Description
FYRA High Vacuum Gauge | Pirani & Capacitive Piezo
7.5×10-6 to 1000 Torr | TriSENS Gauge
The FYRA High Vacuum Gauge is paired with the TriSENS DPCP Quantum Sensor, which is a combined pirani, piezo, and capacitance manometer. It measures from 1000 Torr down to 7.5 x 10-6 Torr. The combined usage of the ultra wide range TriSENS DPCP and FYRA can eliminate the use of multiple sensors to interpret processes and data.
Vacuum Science Simplified
We know vacuum applications can get complicated. FYRA was created to deliver scientific measurement and vacuum control simply with easy integration into almost any system in the market. FYRA Features:
- Easy integration into systems
- Capable of driving multiple types of sensors (ex. piezo, thermal, active, passive, and capacitance manometers)
- Has touchscreen and dial interface
- Intuitively display and manage multiple sensors + control points
- Comes standard with:
- 10 Volt DC output for PLC integration
- USB for data download + documentation of vacuum processing data-points
TriSens | DPCP Quantum Sensor
The DigiVac TriSens DPCP Quantum Gauge is an ultra wide range vacuum sensor that combines the novel Quantum pirani with piezo technology to deliver a measurement range of 7.5 x 10 -6 to 1000 Torr. 0-10V output, RS232 and 1 relay included.
This sensor establishes new standards with an all-in-one wide range measurement solution for a wide selection of vacuum applications. This transducer is an overall cost-effective solution with an ultra-wide 9 decade range that includes 5 decades of gas independent measurement. The Digivac TriSENS combines 3 technologies: Quantum Pirani, Capacitance, Piezo into an all-in-one gauge.
Sensor Details:
Measurement Range: 7.5 x 10-6 to 1000 Torr
Accuracy Specifications:
1000 Torr to .001 Torr = +/- 3%
.0001 Torr to 10-6 Torr = +/- 20%
- Combines 3 vacuum technologies: MEMS Pirani, Capacitative Manometer, and Piezo technology
- 0-10V for PLC Input
- All in one high vacuum measurement, process control, and overpressure indication
- Reliable solid-state relay for process control
- Highly accurate direct pressure measurement down to 10 microns (.01 Torr) + high vacuum measurement down to 10-6
- Ultra-wide 9 decade range that includes 5 decades of gas independent measurement
- Integrated baffle helps protect sensor elements from particulate contamination and increases longevity; no ion gauge required
High Vacuum Gauge Advantages
- Deep & wide measuring range of 9 decades delivered by an all-in-one gauge that combines pirani,
capacitance manometer, and piezo technology - 6 decades of gas independent measurement| 5×10-3 to 1333 mbar
- Reliable solid-state relay for process control
- 0-10V for PLC Input
- LED Color Pressure Indicator
- Robust ceramic capacitance diaphragm gauge
- Mountable in any orientation without impact on performance
Applications:
- Mass spectrometers
- Scanning electron microscopes
- Furnace heat treatment
- PVD coating of glass, optics, tools, etc.
- Refrigeration service and manufacturing
- Semiconductor processing
| Measuring Range | 1×10-5 to 1333 mbar (7.5×10-6 to 1000 Torr) | |
| Measuring principle 1×10-6 to 1×10-3 mbar | MEMS Pirani thermal conductivity | |
| Measuring principle 5×10-3 to 3.99 mbar | Capacitance manometer | |
| Measuring principle 6 to 1333 mbar | MEMS piezo diaphragm | |
| Measurement Accuracy (Torr) | ||
| From | To | Accuracy |
| 7.5×10-6 | 7.5×10-5 | 50% |
| 7.5×10-5 | 7.5×10-3 | 20% |
| 7.5×10-3 | 1000 Torr | 3% |
